ESC (Electrostatic Chuck) Repair Workflow
Endura MCA ESC Repair Workflow
ESC Repair List
| Eq | Model | P/N | Type/Size | Repair |
|---|---|---|---|---|
| AMAT | Producer | all | AlN/12" | Surface retreatment, Flange repair, Re-bonding |
| AMAT | E-Max | 0010-11216 | AlN/12" | Surface retreatment, Re-bonding |
| AMAT | E-Max CT+ | 0010-16392 | AlN/12" | Surface retreatment, Re-bonding |
| AMAT | Enabler | 0010-27784 | AlN/12" | Surface retreatment, Re-bonding |
| AMAT | DPS-2(232) | 0190-23942 | Al2O3(heated)/12" | Surface retreatment, Plate replacement |
| AMAT | DPS-2(G3) | 0190-25087 | Al2O3(heated)/12" | Surface retreatment, Plate replacement |
| AMAT | Super-E | 0010-05966 | AlN/8" | Surface retreatment, Re-bonding |
| AMAT | E-Max | 0010-05971 | AlN/8" | Surface retreatment / Re-bonding |
| AMAT | DPS-Me | 0010-15452 | AlN/8" | Surface retreatment, Plate replacement |
| AMAT | DPS-Po | 0010-15668 | AlN/8" | Surface retreatment, Plate replacement |
| AMAT | DPS-Pu | 0200-02813 | AlN/8" | Surface retreatment |
| TEL | SCCM | 2L10-150079-13 | Al2O3/12" | Surface retreatment |
| TEL | SCCM | 3D10-150388-11 | Al2O3/12" | Surface retreatment |
| TEL | SCCM-TE/SE | all | Al2O3 coated/12" | Surface retreatment |
| TEL | VESTA | 41611 | Al2O3/12" | Surface retreatment |
| TEL | SCCM | 1810-121864-11 | Al2O3/8" | Surface retreatment, Plate replacement |
| TEL | DRM | 1D10-101567-12 | Al2O3/8" | Surface retreatment, Plate replacement |
| Novellus | Novellus | all | Al2O3/12" | Surface retreatment, Re-bonding |
| Novellus | SPEED | all | Al2O3/8" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-312 | Potting/12" | Surface retreatment |
| Lam | Flex | 839-800327-315 | Potting/12" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-363 | Potting/12" | Surface retreatment |
| Lam | Flex | 839-800327-385 | No Potting/12" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-390 | No Potting/12" | Surface retreatment |
| Lam | Kiyo | 839-019090-324 | Potting/12" | Surface retreatment |
| Lam | Kiyo | 839-019090-328 | Potting/12" | Surface retreatment, Re-bonding |
| Lam | Kiyo | 839-019090-374 | Potting/12" | Surface retreatment, Plate replacement |
| Lam | Flex | 839-800327-315 | Al2O3/12" | Surface retreatment, Re-bonding |
| Lam | Kiyo 45 | 839-019090-324 | Al2O3/12" | Surface retreatment, Re-bonding |
| Lam | Kiyo 45 | 839-019090-328 | Al2O3/12" | Surface retreatment, Re-bonding |
| Lam | Kiyo 45 | 839-019090-374 | Al2O3/12" | Surface retreatment, Plate replacement |
| Lam | Flex | 839-800327-385 | Al2O3/12" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-4XX | Al2O3/12" | Surface retreatment |
| Lam | Flex | 839-019090-577 | Al2O3/12" | Surface retreatment, Re-bonding |
| Lam | 608 | 839-019090-608 | Al2O3/12" | Surface retreatment, Plate replacement |
| Lam | 611 | 839-019090-61 | Al2O3/12" | Surface retreatment, Plate replacement |
| Lam | 4520XLe | 839-440562-306 | Al2O3/6" | Surface retreatment, Re-bonding |
| Lam | Exelan | 839-440462-508 | Al2O3/8" | Surface retreatment, Re-bonding |
| Lam | Exelan-HPT | 839-440462-518 | Al2O3/8" | Surface retreatment, Re-bonding |
| Lam | Rainbow | 839-440462-30 | Al2O3/8" | Surface retreatment, Re-bonding |
| Lam | Kiyo | 839-019090-225 | Al2O3/8-12" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-265 | Al2O3/8-12" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-212 | Al2O3/8-12" | Surface retreatment, Re-bonding |
| Lam | Flex | 839-800327-243 | Al2O3/8-12" | Surface retreatment, Re-bonding |
| Lam | Kiyo | 839-019090-223 | Al2O3/8-12" | Surface retreatment, Re-bonding |
OPM & Second Source ESC
Lam Anodizing ESC
AMAT Ultima CVD ESC
Hitachi 200mm ESC
Novellus INOVA ESC
OPM & Second Source ESC List
| Eq | Model | P/N | Type/Size | Description |
|---|---|---|---|---|
| Lam | 718-043893-602 | Anodizing / 6" | ||
| Lam | 718-043893-612 | Anodizing / 6" | ||
| Lam | 718-043893-614 | Anodizing / 6" | ||
| Lam | 718-043893-622 | Anodizing / 6" | ||
| Lam | 718-043893-632 | Anodizing / 6" | ||
| Lam | 718-043893-634 | Anodizing / 6" | ||
| Lam | 718-092326-061 | Anodizing / 6" | ||
| Lam | 718-092326-065 | Anodizing / 6" | ||
| Lam | 718-094523-261 | Anodizing / 6" | ||
| Lam | 2718-094523-26 | Anodizing / 6" | ||
| Lam | 718-094523-265 | Anodizing / 6" | ||
| Lam | 718-094523-361 | Anodizing / 6" | ||
| Lam | 718-094756-061 | Anodizing / 6" | ||
| Lam | 718-094756-065 | Anodizing / 6" | ||
| Lam | 718-043893-801 | Anodizing / 8" | ||
| Lam | 718-043893-802 | Anodizing / 8" | ||
| Lam | 718-043893-811 | Anodizing / 8" | ||
| Lam | 718-043893-812 | Anodizing / 8" | ||
| Lam | 718-043893-818 | Anodizing / 8" | ||
| Lam | 718-092326-066 | Anodizing / 8" | ||
| Lam | 718-092326-081 | Anodizing / 8" | ||
| Lam | 718-092326-082 | Anodizing / 8" | ||
| Lam | 718-094523-281 | Anodizing / 8" | ||
| Lam | 718-094523-282 | Anodizing / 8" | ||
| Lam | 718-094523-283 | Anodizing / 8" | ||
| Lam | 718-094756-081 | Anodizing / 8" | ||
| Lam | 718-094756-082 | Anodizing / 8" | ||
| AMAT | Ultima | 0040-18219 | Coating / 8" | |
| AMAT | Ultima | 0040-48594 | Coating / 12" | |
| Novellus | INOVA | 02-314135-01 | PMAG 300mm Table | 8 weeks |
| Novellus | INOVA | 02-371240-01 | TD4 300mm Table | 8 weeks |
| Novellus | INOVA | 02-412414-13 | CIP1 300mm Table | 8 weeks |
| Hitachi | 2-826194 | Coating / 8" | ||
| Hitachi | 2-821454 | Coating / 8" |
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