Why Bonded Slit Valve (BSV) Door?
Benefits & Features
- Bonded design minimizes abrasion leading to less particles in many processes compared to installation of typical O-ring. Therefore it can provide up to 10-fold increase in seal life.
- The bonded Slit Valve increase the life expectancy and performance of the door’s seal during semiconductor processing.
- Limited particles generation for lower contamination.
- Minimizing the chance of potential leaks.
- Decreasing replacement downtime, simplifying installation and ensuring proper seal orientation without twisting.
Conventional slit valve door : O-ring installed in a dovetail gland
Bonded Slit Valve Door Design – Custom seal bonded into a door
Bonded Slit Valve (BSV) Plate List
| code | Picture | Equipment | P/N | Material |
|---|---|---|---|---|
| G01 |  | Novellus INOVA & SPEED, TES Challenger L/L | 0040-84390 | F-972 |
| G04 |  | Lam Rocker | 790-008220 | EL-270 |
| G06 |  | TES Challenger, ATTO P/C | 249415 | EL-270 |
| G09 |  | AMAT Producer & Ultima | 3870-04001 & 312740 | EL-270 |
| G12 |  | TEL TRIAS P/C | 3M12-012910 | EL-270 |
| G15 |  | AMAT EMAX ,DPS L/L & P/C AMAT I-SPRINT L/L & P/C | 0190-12806 0190-12809 | EL-270 |
| G17 |  | AMAT ENDURA P/C | 0040-84391 & 0041-03585 | F-972 |
| G18 |  | AMAT ENDURA L/L | 0040-84390 | F-972 |
| G22 |  | AMAT ULTIMA,TURBO GATE | 5080W I-475 |
|
| G28 |  | LAM KIYO E5, FLEX EX P/C | EL-270 | |
| G29 |  | 5641A-1282 | EL-270 |
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