Pumping at the power consumption to be 60% or more in the whole of Tact Time of Dry Pump used in semiconductor and LCD production process is equivalent to the power consumption of the Run Mode. Therefore e-Saver is a product developed for the purpose of reducing power consumption during Idle Mode is installed in the rear end of the Dry Pump. In addition, there is also a role to reduce the clogging state of Powder in the pipe. If the power of process equipment used in semiconductor and LCD manufacturing process consumes Component classified separately, Process pump account for 52% of power consumed. Given such that there are object of the development to realize energy saving.
