CMP Equipment Repair Work Flow
CMP Equipment Repair Details
- AMAT 300mm LK Pad Condiioner Head
- Repair Items : Upper bearing, Lower bearing, Diaphragm, O-rings, Elbow fittings
- AMAT 300mm LK Pad Conditioner Base
- Repair Items : Shaft bearing, Shaft Gear, Cross bearing, Harmonic driver, Spacer 53L, Spacer 01, Wave Washer, Shaft bearing clamp
- MKS UPA Precision Controller
- Repair Items : Proportional valve, Bleed valve, Vent valve, Vacuum valve, Acrylic valve manifold, PCB
- AMAT 300mm LK Spindle Assembly
- Repair Items : KAYDON bearing, Upper bearing, Bottom bearing, Thrust washer, Upper snap ring, Bottom snap ring, Upper Nut
- Ebara Rotary Joint S1 type
- Repair items : Lip seal, Oil seal, O-rings, Bearings, Stator, Rotor 4t, Rotor 6t, Main shaft
- Ebara Rotary Joint S2 type
- Repair Items : Lip seal, Oil seal, O-rings, Bearings, Stator, Rotor 4t, Rotor 6t
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