CMP

Consumable Parts & Engineering Parts

• CMP PVA Brush
• CMP Dresser Brush (Nylon Brush)
• CMP Retainer Ring (Second Source)
• CMP Filter
• CMP 200mm Cylinder type Pad Conditioner Head and Assembly
• CMP Rotary Joint

Repair & Refurbishment 

• CMP Equipment Repair (200mm/300mm)
• CMP Equipment Refurbishment
• Robot Repair

Cost Reduction Solutions

• Retaining Ring Refurbishment
• Membrane Cleaning
• Retaing Ring Cleaning
• Multi-hole Slurry Nozzle

Quality Improvement Solutions

• Slurry Multi-hole Nozzle (Increased Removal Rate and Decreased Slurry Consumption)
• CMP Dresser Brush (Bristles Flatness Improvement)
• CMP Rotary Joint Lifetime Extension by Using SiC LIP Seal