Diffusion

Consumable Parts & Engineering Parts

• N2 FOUP Purge System  (200/300mm KE, TEL)
• Bonded Slit Valve (BSV) Door 
• Remote Control System
• Dry Pump Power Saving Apparatus (e-Saver)

Repair & Refurbishment

• Diffusion Furnace / LPCVD Refurbishment  (200/300mm KE, TEL)
• Ozone (O3) Generator Overhaul and Repair

Cost Reduction Solutions

• Dry Pump Power Saving Apparatus (MESA)

Quality Improvement Solutions

• Controlling O2 and Moisture inside Diff Furnaces – N2 FOUP Purge System  (200/300mm KE, TEL)