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O2 Technology
Bridging Legacy and Future Semiconductor Eco-systems
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CMP Parts
Retainer Ring (2nd)
Multi-hole Slurry Nozzle
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CMP 200mm Cylinder type Pad Conditioner Assembly
ESC (OPM & 2nd Source)
FOUP LPM N2 Purge System
FOUP Furnace N2 Purge System
Photo Chuck (2nd Source)
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LAM Vortex Robot Repair and Rehaul
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AlN Heater Repair
ElectroStatic Chuck Repair
ESC Repair Workflow
ESC Repair List
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Photo Chuck Repair
Showerhead Repair
Semiconductor Spindle Repair and Rehaul
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Retaining Ring Refurbishment
Membrane Cleaning
Retaining Ring Cleaning
Slurry Multi-hole Nozzle
Controlling O2 and moisture inside Equipment
PEO coated RPS Block
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