The Unsung Hero
This tool must deliver time and time again and perform to the tight tolerances; it makes the imperfect, perfect. The wafer handling robot is tasked with some of the most repetitive processes in any given production environment and does so without its praises. A typical handling robot will be operating for its whole life, 24/7. Even the most capable tools need some TLC, every now and again.
Vortex Robot Repair
We offer expanded repair and rehaul services for LAM Vortex robots. Depending on the requested service, after incoming inspection what follows may include replacement of cleaning and disassembly, replacement of consumable parts, defective parts, and up to replacement of the motor and boards. Please reach out for further details regarding the work scope.
Repair List
| Model | P/N | Process | Maker | |
|---|---|---|---|---|
 | Vortex MACH I | 853-186514-001 | PVD | LAM |
 | Vortex MACH IV | 853-226962-001 | CVD | LAM |
 | Vortex XY5+ | 853-296817-001 | CVD, PVD | LAM |
 | Vortex XY5 | 02-401147-00 | CVD | LAM |
| Vortex XY5 | 02-4101147-00 | ALD | LAM | |
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