Showerhead Repair
E-max Showerhead
Enabler E2 Showerhead
Enabler E5 Showerhead
Producer Showerhead
Showerhead Repair List
| Item | P/N | Refurbishment Details |
|---|---|---|
| E-max CT + 300mm SiC | 0040-87046 0040-87047 | Plate Replacement Re-bonding + Re-Anodizing |
| Enabler E2 300mm SiC | 0040-78244 0041-31511 | Plate Replacement Re-bonding + Re-Anodizing |
| E5 Showehead SiC | 0041-25010 | Re-bonding + Re-Anodizing |
| Producer Y2O3 | 0040-87958 | Plate Replacement |