RPS Repair Features and Benefits
- Field-proven repair technologies to support top-tier semiconductor fabs in Korea and a rigorous quality control system by an engineering team with technical expertise ensure repair services are of the highest quality.
- Reliability test that is performed with “Auto Self Test System” and “Smart Power Monitoring System” can differentiate our value-added services from any other competitors’.
- OPM (Original Product Manufacturer) parts are used for most repair services.
- Competitive price and shorter lead time.
- Well organized parts management system and repair facility near end user are established. Repair shop for the US customers has opened in Georgetown, Texas.
RPS repair LIST
| Maker | Model Number |
|---|---|
| MKS | AX7650 |
| MKS | AX7651 |
| MKS | AX7651-2 |
| MKS | AX7657 |
| MKS | AX7657-2 |
| MKS | AX7657-5 |
| MKS | AX7657-7 |
| MKS | FI20620-1 |
| MKS | AX7670 |
| MKS | AX7670-02 |
| MKS | AX7670-12 |
| MKS | AX7670-06 |
| MKS | AX7670-16 |
| MKS | AX7670-16R |
| MKS | AX7670-19 |
| MKS | AX7670-21 |
| MKS | AX7670-60 |
| MKS | AX7680 |
| MKS | FI80131 |
| MKS | FI80131-C |
| MKS | AX7685 |
| MKS | AX7685-01 |
| MKS | FI80146 |
| MKS | FI80146-1 |
| MKS | FI80146-R |
| MKS | AX7640 |
| MKS | AX7645-RH |
| MKS | AX7645-PS |
| MKS | AX7635 |
| MKS | AX7635-02 |
| MKS | AX7635-02-R |
| MKS | AX7635-03 |
| MKS | AX7665-01 |
Repair Workflow
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