Semiconductor Spindle Repair and Rehaul

We specialize in the repair and rehaul of semiconductor spindles used in semiconductor processing equipment. Across in the industry, and especially in legacy fabs, the need for spindle maintenance is becoming increasingly apparent. Depending on the spindle at hand, issues like bearing failure, dried lubrication, or water leaks, can bring processing to a halt. 

AMAT Spindle 9240-03211. Testing Semiconductor Spindle Repair and Rehaul.
Spindle undergoing testing after repair.

Upon receival of a spindle for repair, the overall unit goes through an incoming inspection, where we visually inspect the housing, pac-seal, shaft, motor, and smaller parts like O-rings to determine its current condition. Following disassembly and further inspection, we are able to determine the repairs needed for the unit. After repair, we rigorously test the spindle to ensure completion. 


spindle repair list
Service Part Name Model Number
Repair AMAT CMP Spindle 0010-77331
Repair Axsys Spindle motor 9240-03211

We are continuously updating this list with more models as they become available. If you don’t see your model number, please reach out to confirm service for your unit!


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