Heating Jacket

Heating Jacket Line-up

Comparison of Configurations and Features 

 

100% PTFE PTFE Coated Glass Fiber Silicon Coated Glass Fiber
Materials (Outer/ Insulator/ Heating Element/ Inner) 100%PTFE cloth / Silica/ dual or single Ni-Cr wire/  100%PTFE PTFE coated glass fiber/  optional / dual or single Ni-Cr wire/ PTFE coated glass fiber Silicon coated glass fiber/ optional / dual or single Ni-Cr wire/ Silicon coated glass fiber
Application Vacuum & Special gas line Vacuum & Special gas line Pump fore line, pump inlet & outlet, Scrubber
Process Metal, CVD, Diff, Etch Etch, Nitride LPCVD, TEOS, ALD
Specification up to 280°C up to 250°C up to 180°C

 

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