Implant Arc Chamber Repair

Simple & Easy Maintenance Ion Source Head

By simplifying design of ion source and modifying multi-piece arc chamber to uni-body type, very easy maintenance (almost no maintenance) and cost savings (42%) are achieved.

Original Source Head Ass’y Modified Source Head Ass’y
   IHC : Indirectly Heated Cathode  EHS : Easy Maintenance Source
 Configurations  Arc chamber (8pcs), Gas feed tube(1), Repeller Clamp Posts(1), Filament clamp posts(1), Cathode clamp posts(1), Aluminum post insulator(4), Arc chamber retaining spring hook(4), Cathode strap(1), Gas feed tube connector(1), Power feedthru(4), Post insulator shield(4) ① Arc chamber (6pcs),  ② Filament clamp posts (2),   ③Repeller clamp posts(1),   ④ Cathode clamp posts (1)
 Features
  •  Complicated structure
  • Hard maintenance
  • Higher CoO
  • #of parts : 31
  • Simple structure 
  • Easy maintenance 
  • Competitive price & lower CoO
  • #of parts : 10


 
   Multi-piece Arc Chamber   Uni-Body Arc Chamber
 Features
  •  Complicated cleaning procedure 
  • Arc chamber Not Repairable
  •  Simple Cleaning by using only Air-blow gun
  • Arc Chamber Repairable !!!

 Effective Tungsten (W)  Coating on Graphite Parts  

  • Tungsten (W) Coating on Graphite : Arc Chamber built with graphite coated with tungsten shows  better characteristics than one with pure tungsten. It is widely adopted in the top-tier semiconductor companies for the reason of low CoO (Cost of Ownership) and easy maintenance.

Aperture, Top

Repeller

 

Original (IHC) Modified & Improved (EMS)
Materials  Pure Tungsten Tungsten coating on Graphite 
Weight (g)  672,4 g  (Aperture) 82.5 g  (Aperture) 
thickness (um) –  ≥ 250 ㎛  ( W – coating )
Parts Reusable ? Not Reusable   Reusable 3 times                                    (Aperture and Repeller)

 Arc Chamber Repair & Refurbishment 

Before repair After Repair Details
  • Repairing damaged Top Aperture.
  • Once repaired, Aperture can be used semi-permanently.
  • Applicable to Varian VIISta 810 & Axcelis NV-GSD, Nission top aperture parts.
   
  •  Repairing damage Arc Chamber
  • If W liner is used, Arc Chamber can be used semi-permanently.
  • Applicable to Axcelis NV-GSD Arc chamber.

 

Modified Parts List & Repairable Parts List

 

If you need more information,  please leave your contact information.    Contact Us