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O2 Technology
Semiconductor Company
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CMP Parts
Retainer Ring (2nd)
Multi-hole Slurry Nozzle
CMP PVA Brush
CMP Dresser Brush
CMP filter
CMP Rotary Joint
CMP 200mm Cylinder type Pad Conditioner Assembly
ESC (OPM & 2nd Source)
Photo Chuck (2nd Source)
N2 FOUP Purge System
Why N2 FOUP Purge?
For Diffusion Furnace
For Cluster Type
Heating Jacket
Bonded Slit Valve (BSV)
Dry Pump Power Saver (e-Saver)
Remote Control System
Vacuum Bellows
Refurb & Repair
Ozone Generator Repair & Overhaul
Robot Repair and Overhaul Services
RPS Repair
On-site Chamber Regen Service
Diffusion Refurbishment
Diff Furnace Refurbishment
Diff Furnace Relocation
TEL Fomula Refurbishment
CMP Repair
CMP Repair Workflow
CMP Repair Details
CMP Refurbishment
AlN Heater Repair
ElectroStatic Chuck Repair
ESC Repair Workflow
ESC Repair List
Photo Chuck Repair
Showerhead Repair
Implant Arc Chamber Repair
Fab Solutions
CMP Cost Reduction
Retaining Ring Refurbishment
Membrane Cleaning
Retaining Ring Cleaning
Slurry Multi-hole Nozzle
Controlling O2 and moisture inside Equipment
PEO coated RPS Block
Dry Pump Power Saving
Surplus
Available Equipment
Wanted Equipment
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