Consumable Parts & Engineering Parts
- Uni-Body Arc Chamber
- N2 FOUP Purge System (Purging load port of cluster type equipment)
Repair & Refurbishment
Cost Reduction Solutions
- Uni-Body Arc Chamber
Quality Improvement Solutions
- Controlling O2 and Moisture inside Cluster-type Equipment – N2 FOUP Purge System (Purging load port of cluster type equipment)